For high resolution imaging in an SEM and for accurate analysis by EDS or EBSD, good sample preparation is essential. If a specimen is cut with scissors or a knife, sections of the specimen may compress, causing distortion of the original shape.

If a specimen is cut after being frozen with liquid nitrogen, it may be difficult to obtain a clean section. If mechanical polishing is used, problems with physical deformation of the surface, fine scratches and contamination may occur. And for composite materials with thin, soft layers, accurate thickness measurements can be difficult because the layers tend to be crushed.​​​

Figure 1. Coxem CP-8000+ ion mill. Image credit: COXEM Co. Ltd.​​​​​​​

To simplify the preparation of these difficult samples, Coxem has developed the CP-8000+ ion mill. An ion milling system is a sample preparation device that can section a surface very cleanly by applying an argon plasma ion beam to the sample. Since an ion mill removes material at the atomic level, sections prepared by ion milling are much cleaner and more precise than those that can be obtained using traditional polishing methods. No mechanical stress is imposed on the sample and contamination is eliminated because no chemical polishing agent is used. Additionally, ion milling systems can etch an area approximately 50 times larger than a FIB using a gallium ion beam in the same amount of time, providing faster sample throughput at a significantly lower cost. .

When equipped with the proper sample holder, an ion mill can be used in a wide range of applications, including fibers, ceramics, metals, polymers, films, and even powders. The CP-8000+ manufactured by COXEM is an ion milling system that provides an etch rate of over 700 um per hour (at 8 kV, Si wafer), and can be quickly mastered even by novice users. Equipped with a one-touch smart sample holder, sample loading is fast and accurate, and etching progress can be observed in real time via an integrated camera in the chamber. The CP-8000+ even includes a special sample holder for flat milling, so no additional options or accessories are required for large-area milling.

The examples below show just a few of the sample types that can be cut and prepared using an ion mill. If your work requires in-depth preparation of difficult samples, an ion mill may be the ideal solution to speed up sample preparation and improve your imaging and analysis.

Figure 2. Anodic powder on aluminum foil. Image credit: COXEM Co. Ltd.​

Figure 3. Electrode. Image Credit: COXEM Co. Ltd.​

Figure 4. Printed Circuit Board. Image Credit: COXEM Co. Ltd.​

Figure 5. Fiber Film.  Image Credit: COXEM Co. Ltd.​

Figure 6. Sensor Chip. Image Credit: COXEM Co. Ltd.​

This information has been obtained, reviewed and adapted from materials provided by COXEM Co. Ltd.

For more information on this source, please visit COXEM Co. Ltd.